Semi S2 & Semi S6 Tests
Especially in the semiconductor industry production facilities are in place, which use very toxic substances. To safely operate such machines frequent integrity testing according to Semi S2 and/or Semi S6 standard is required.
With this test a possible toxic gas leakage is simulated by a tracer gas release. The exhaust ventilation system of the machine must be so efficient that no tracer can leave the housing of the machine and gets into the room with the working staff.